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New EUV system at TSMC

New EUV system at TSMC
In the fourth quarter 2015, we will deliver a new EUV system at TSMC. The system will be used in the production environment. The set of cranes will interact with the OHT transport system, an automated transport system that travels on the overhead track and "directly" accesses the load port of the stocker or process equipment by the belt driven hoisting mechanism.