EUV crane delivery in Taiwan

In Taiwan an order of four sets of EUV cranes will be delivered at two different locations in the country. The crane sets with 4 x 5.000 kg hoists are now ready for use in the ISO 5 cleanrooms. Together with our Taiwanese partner, MIC, all systems will be installed this year. The crane sets will demand special attention. Because of very limited room for internal transportation, the cranes were designed and executed with a special split-girder version making it possible to manoeuvre through the building and make elevator access possible. A challenge for our engineering department.