EUV crane delivery in Taiwan
In
Taiwan an order of four sets of EUV cranes will be delivered at two different
locations in the country. The crane sets with 4 x 5.000 kg hoists are now ready
for use in the ISO 5 cleanrooms. Together with our Taiwanese partner, MIC, all
systems will be installed this year. The crane sets will demand special
attention. Because of very limited room for internal transportation, the cranes
were designed and executed with a special split-girder version making it
possible to manoeuvre through the building and make elevator access possible. A
challenge for our engineering department.